Influence of oxygen partial pressure on SmBa2Cu3O7-δ film deposited by laser chemical vapor deposition
نویسندگان
چکیده
منابع مشابه
EFFECT OF O2 PARTIAL PRESSURE ON YBa2Cu3O7–δ THIN FILM GROWTH BY PULSED LASER DEPOSITION
YBa2Cu3O7 d thin films were processed by pulsed laser deposition on (1 0 0) LaAlO3 substrates using O2 partial pressures from 120 to 1200 mTorr. The effect of O2 pressure on film properties including room temperature resistivities and microstructures was studied for a unique set of deposition parameters. The film quality was observed to remain high over a wide range of O2 partial pressures, wit...
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ژورنال
عنوان ژورنال: Journal of Asian Ceramic Societies
سال: 2020
ISSN: 2187-0764
DOI: 10.1080/21870764.2020.1860434